Invention Grant
- Patent Title: Grating couplers with a silicide mirror
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Application No.: US16515779Application Date: 2019-07-18
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Publication No.: US10921526B2Publication Date: 2021-02-16
- Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: G02B6/34
- IPC: G02B6/34 ; G02B6/12 ; F21V8/00
Abstract:
Structures for a grating coupler and methods of fabricating a structure for a grating coupler. A silicide layer is formed on a patterned section of a semiconductor layer. The grating structures of a grating coupler are formed over the silicide layer and the section of the semiconductor layer.
Public/Granted literature
- US20210018690A1 GRATING COUPLERS WITH A SILICIDE MIRROR Public/Granted day:2021-01-21
Information query
