Invention Grant
- Patent Title: Linerless continuous amorphous metal films
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Application No.: US16596647Application Date: 2019-10-08
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Publication No.: US10930493B2Publication Date: 2021-02-23
- Inventor: Susmit Singha Roy , Yong Wu , Srinivas Gandikota
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/324

Abstract:
Embodiments described herein generally relate to methods of depositing thin films and, more particularly, to depositing metal thin films. The methods herein provide a nucleation free conversion (NFC) approach which involves forming an amorphous silicon layer over the dielectric layer, and performing an NFC process which acts to convert the amorphous silicon layer into a thin metal film. In some embodiments, the NFC process is performed multiple times until the resulting thin metal film is continuous. A bulk metal is formed over the thin metal film.
Information query
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