- 专利标题: Automatic optical inspection method
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申请号: US16050261申请日: 2018-07-31
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公开(公告)号: US10937151B2公开(公告)日: 2021-03-02
- 发明人: Fan Wang , Hailiang Lu , Kai Zhang
- 申请人: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- 申请人地址: CN Shanghai
- 专利权人: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- 当前专利权人: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- 当前专利权人地址: CN Shanghai
- 代理机构: Muncy, Geissler, Olds & Lowe, PC
- 优先权: CN201710653164.8 20170802
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G06T7/00 ; G01N21/88 ; G01N21/95
摘要:
An automatic optical inspection (AOI) method for inspecting defects on a surface of an object is provided. The method includes: providing at least two different illumination systems; acquiring, by at least one detector, at least two pieces of image information of the object, each piece of image information being acquired under illumination of a corresponding one of the illumination systems; obtaining at least two pieces of surface defect information of the object by analyzing the acquired at least two pieces of image information using a computer and storing at least one of the obtained at least two pieces of surface defect information by the computer; and combining, by the computer, all of the at least two pieces of surface defect information to de-duplicate the at least two pieces of surface defect information and obtain a piece of combined surface defect information.
公开/授权文献
- US20190043182A1 AUTOMATIC OPTICAL INSPECTION METHOD 公开/授权日:2019-02-07
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