-
公开(公告)号：US11383940B2
公开(公告)日：2022-07-12
申请号：US16097550
申请日：2017-04-28
IPC分类号： B65G47/90 , H01L21/677 , H01L21/687 , B25J9/16 , H01L21/673 , H01L21/68
摘要： A robotic manipulator for handling a cassette and an automated cassette transport device are disclosed, the device including a mechanical arm (1), an end actuator (2) at an end of the mechanical arm (1) and a vision-based locating assembly (3) on the end actuator (2). On the one hand, the vision-based locating assembly (3) can determine the position of a flange of the cassette, thereby identifying the cassette. In other words, the cassette can be identified based on a feature of the cassette itself. This dispense with a separate locating marker while improving cassette measuring and handling accuracy. On the other hand, transportation of the cassette is allowed by complementary retention of its flange on a recessed surface of the end actuator (2).
-
公开(公告)号：US11119412B2
公开(公告)日：2021-09-14
申请号：US16637658
申请日：2018-08-09
发明人： Jun Qian , Sihong Zhai
IPC分类号： G03F7/20
摘要： An exposure apparatus and method. The exposure apparatus includes a control system, light source system, plurality of illumination systems and plurality of projection objective lenses. The light source system is configured to emit a plurality of first illumination beams incident on the illumination systems. Each illumination system includes a variable attenuator and branch energy detector. The branch energy detector is configured to detect an illuminance level of a second illumination beam generated in the corresponding illumination system and feed it back to the control system. The control system is configured to adjust the illuminance levels of the second illumination beams in the respective illumination systems by controlling the respective variable attenuators therein. The exposure apparatus and method have improved exposure performance and allow finer and faster energy adjustments, thus enabling precise control and higher exposure accuracy.
-
公开(公告)号：US11107717B2
公开(公告)日：2021-08-31
申请号：US16097551
申请日：2017-04-28
IPC分类号： H01L21/677 , H01L21/67 , G01S15/931
摘要： A cassette transport device is disclosed which includes a smart cart, a base expansion frame mounted on the smart cart and a cassette-loading frame fixed to the base expansion frame. The cassette-loading frame is partitioned into several segments each accommodating a plurality of cassette trays. Each of the cassette trays defines, on its surface, a first trough and a second trough in the first trough. The first trough is configured to retain a cassette of a first size, and the second trough is configured to retain a cassette of a second size. With the first and second troughs, each of the cassette trays is able to retain a cassette of either the first or second size, making the cassette transport device possible to be used in transportation of the both types of cassettes with a high yield. Moreover, the smart cart is capable of automated transportation without human intervention or track construction while enabling savings in transportation cost, time and labor.
-
公开(公告)号：US11106005B2
公开(公告)日：2021-08-31
申请号：US16067375
申请日：2016-12-28
发明人： Tongke Su
摘要： A prism rotation adjustment mechanism, a photolithographic exposure system and a photolithography tool are disclosed. The prism rotation adjustment mechanism includes a frame (200), a flexible mechanism (100) and an actuation mechanism. The flexible mechanism (100) includes a fixing component (110), an actuating component (120), a connecting component (130) and a swinging component (140) that are flexibly articulated in a sequence. The fixing component (110) is fixed to the frame (200). The actuation mechanism is fixed to the frame (200) and coupled to the actuating component (120). On the swinging component (140) are secured a prism wherein an axis of articulation between the swinging component (140) and the fixing component (110) is in correspondence with a rotational center of the prism. The flexible mechanism of the prism rotation adjustment mechanism is a quadrilateral flexibly-articulated assembly, in which, when driven by the actuation mechanism, the actuating component can convert translational movement into rotational movement, allowing the control of the rotational movement to be more accurate and hence improving the rotational control accuracy of the prisms. Moreover, the axis of articulation between the swinging component and the fixing component provides a stable axis for the prisms to rotate thereabout, avoiding crosstalk during the rotation and hence additionally improving the prism rotation control accuracy.
-
公开(公告)号：US10985044B2
公开(公告)日：2021-04-20
申请号：US16321632
申请日：2017-07-27
发明人： Zhi Zhu , Zhijun Huo
IPC分类号： H01L21/68 , G01B11/27 , G02B21/00 , G02B21/04 , G02B21/18 , G02B27/10 , H01L21/67 , H01L23/00
摘要： A machine vision system for substrate alignment includes first and second illumination sources (11, 12), first and second reflectors (21, 22), first and second objective lenses (31, 32) and first and second detectors (41, 42), each of which pair is symmetric with respect to an X-axis. Light beams emitted from the first and second illumination sources are irradiated on and reflected by respective substrates (1, 2), amplified by the respective objective lenses and received and detected by the respective detectors. An alignment apparatus is also disclosed. Disposing each of the pair of the first and second illumination sources, the first and second reflectors, the first and second objective lenses and the first and second detectors in symmetry with respect to the X-axis results in a significantly reduced footprint of the machine vision system along the orientation of lens barrels of the objective lenses and hence an expanded detection range thereof and improved alignment efficiency and accuracy.
-
公开(公告)号：US10983442B2
公开(公告)日：2021-04-20
申请号：US16651663
申请日：2018-09-29
发明人： Fuping An , Zhaoxiang Chu , Yinzhang Guo
IPC分类号： G03F7/20
摘要： A projection objective, used for projecting an object space to an image space. The objective includes, from the object space along an optical axis in sequence: a first lens set (G1) having positive focal power, a second lens set (G2) having negative focal power, a third lens set (G3) having positive focal power, a fourth lens set (G4) having negative focal power, and a fifth lens set (G5) having positive focal power. Aspheric lenses are provided in the first lens set (G1), the second lens set (G2), the third lens set (G3), the fourth lens set (G4), and the fifth lens set (G5). According to the design, the number of lenses is reduced, the structure of the objective is more compact, the transmittance of the objective is improved, the structural design of aspheric lenses is optimized, the asphericity of the aspheric lenses is reduced, the processing difficulty and costs for the aspheric lenses are reduced, and except for the above situations, the objective has a bitelecentric structure, and the sensitivity of the objective for micro irregularity defects on a mask surface is reduced.
-
公开(公告)号：US10976673B2
公开(公告)日：2021-04-13
申请号：US16321664
申请日：2017-07-25
发明人： Yongwei Fan , Huaiyang Chen
IPC分类号： G03F7/20
摘要： A levellable reticle library assembly includes a reticle library assembly (4), a pivot assembly (3) and a frame assembly (2). The reticle library assembly (4) is disposed on the frame assembly (2) so that it is able to be leveled by the pivot assembly (3) via the frame assembly (2), and the reticle library assembly (4) can also be leveled by the frame assembly (2).
-
公开(公告)号：US10928704B2
公开(公告)日：2021-02-23
申请号：US16499761
申请日：2017-08-09
发明人： Yanfei Wang , Fuping Zhang , Xiang Jia
摘要： A shutter device includes a movable shading module and a movement control module configured to control movement of the movable shading module. The movable shading module includes a shading unit, a driving unit and a signal measuring unit. The shading unit includes two blades, and the movement control module is configured to generate a control signal. The driving unit is configured to receive the control signal and drive the two blades. The signal measuring unit is configured to measure an operating status of the blades feed it back to the movement control module in real time. The movement control module is configured to update the control signal based on the fed back operating status. This shutter device can overcome the problems of low exposure dose accuracy and light leaks arising from the use of existing shutters and provide various accurately-controlled exposure doses suitable for different applications.
-
公开(公告)号：US10921719B2
公开(公告)日：2021-02-16
申请号：US16338669
申请日：2017-09-25
发明人： Zhiyong Yang , Bing Xu , Yuzhi Li , Chang Zhou
摘要： An optical measurement device includes: a deformation measurement device for measuring magnitude of deformation of an optical detection platform frame, and a correction module for correcting the position of a substrate carrier and/or the position of an optical detection device according to the magnitude of deformation of the optical detection platform frame, so as to eliminate an error in measurement of mark positions due to deformation of the frame. An optical measurement method is also disclosed.
-
公开(公告)号：US10903105B2
公开(公告)日：2021-01-26
申请号：US16080426
申请日：2017-02-27
发明人： Feibiao Chen , Yaping Ge , Song Guo , Jingchao Qi
IPC分类号： H01L21/68 , H01L21/50 , H01L21/67 , H01L21/673 , H01L21/683 , H05K13/08 , H05K13/04
摘要： A flip-chip bonding device and method are disclosed. The bonding device includes: a supply unit (10) for separating a flip-chip (200) from a carrier (100) and providing the flip-chip (200), the supply unit (10) including flipping device (11); a transfer unit (20) for receiving the flip-chip (200) from the flipping device (11); a position adjustment unit (30) for adjusting the positions of flip-chips (200) on the transfer unit (20); a bonding unit (40) for bonding the flip-chips (200) on the transfer unit (20) onto a substrate (400); a transportation unit (50) for transporting the transfer unit (20); and a control unit (60) for controlling the movement of the preceding units. The transfer unit (20) is capable of receiving multiple flip-chips (200) and allows the flip-chips (200) to be bonded simultaneously. This can result in savings in bonding time and an improvement in throughput. Moreover, during the transportation of the transfer unit (20), the positions of the flip-chips (200) thereon can be adjusted by the position adjustment unit (30), thereby ensuring high positional accuracy of the flip-chips (200) in the subsequent bonding step. As a result, a high-accuracy bonding can be achieved.
-
-
-
-
-
-
-
-
-
搜索结果
103 条记录 (耗时 0.033 秒)
