Invention Grant
- Patent Title: Wafer storage container
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Application No.: US15775771Application Date: 2018-04-02
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Publication No.: US10937677B2Publication Date: 2021-03-02
- Inventor: Bum Je Woo
- Applicant: Bum Je Woo
- Applicant Address: KR Seongnam
- Assignee: Bum Je Woo
- Current Assignee: Bum Je Woo
- Current Assignee Address: KR Seongnam
- International Application: PCT/KR2018/003876 WO 20180402
- International Announcement: WO2019/194326 WO 20191010
- Main IPC: B65D85/30
- IPC: B65D85/30 ; H01L21/673 ; B08B9/032 ; B65D85/00 ; H01L21/677

Abstract:
The present invention relates to a wafer storage container capable of removing fumes on a wafer or removing moisture therefrom by supplying purge gas to the wafer stored in a storage chamber. More particularly, the present invention relates to a wafer storage container, in which uniform purge gas injection is achieved and thus formation of dead regions is minimized, formation of turbulence in a storage chamber is prevented and thus wafer purging efficiency is improved, and a size reduction of an injection member injecting purge gas into the storage chamber is achieved and thus a size reduction of the entire wafer storage container is achieved.
Public/Granted literature
- US20200303226A1 WAFER STORAGE CONTAINER Public/Granted day:2020-09-24
Information query
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