Invention Grant
- Patent Title: Gas distributor and flow verifier
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Application No.: US16040326Application Date: 2018-07-19
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Publication No.: US10943769B2Publication Date: 2021-03-09
- Inventor: Mark Taskar , Iqbal A. Shareef
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; F16K11/10

Abstract:
Apparatus and methods for distributing and mixing gas are provided. In one example, a gas distributor comprises a body, a gas inlet for admitting gas to the body, an orbital array of gas outlets for distributing the gas to an external component, and a central gas distribution point disposed within the body at a center of the orbital array of gas outlets and in fluid communication with the orbital array of gas outlets.
Public/Granted literature
- US20200027702A1 GAS DISTRIBUTOR AND FLOW VERIFIER Public/Granted day:2020-01-23
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