Invention Grant
- Patent Title: Non-transitory computer-readable medium and method for monitoring a semiconductor fabrication process
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Application No.: US16402375Application Date: 2019-05-03
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Publication No.: US10949949B2Publication Date: 2021-03-16
- Inventor: Choonshik Leem , Taelim Choi , Yongdeok Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2018-0109500 20180913
- Main IPC: G06T3/40
- IPC: G06T3/40 ; G06T7/00

Abstract:
A non-transitory computer-readable medium for monitoring a semiconductor fabrication process includes an image conversion model having an artificial neural network. The image conversion model, when executed, causes the processor to receive a first image and a second image of a semiconductor wafer. The artificial neural network is trained by inputting a dataset representing the first image and the second image, generating a conversion image of the semiconductor wafer and calibrating weights and biases of the artificial neural network to match the conversion image to the second image. A third image of the semiconductor wafer is generated based on the calibrated weights and biases of the artificial neural network. The image conversion model with the trained artificial neural network may be transmitted to another device for image conversion of low resolution images.
Public/Granted literature
- US20200090304A1 NON-TRANSITORY COMPUTER-READABLE MEDIUM AND METHOD FOR MONITORING A SEMICONDUCTOR FABRICATION PROCESS Public/Granted day:2020-03-19
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