Invention Grant
- Patent Title: Coil actuated pressure sensor and deformable substrate
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Application No.: US16390355Application Date: 2019-04-22
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Publication No.: US10955306B2Publication Date: 2021-03-23
- Inventor: Bryan Cadugan , Jason Boudreau , William P. Taylor
- Applicant: Allegro MicroSystems, LLC
- Applicant Address: US NH Manchester
- Assignee: Allegro MicroSystems, LLC
- Current Assignee: Allegro MicroSystems, LLC
- Current Assignee Address: US NH Manchester
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- Main IPC: G01B7/14
- IPC: G01B7/14 ; G01L9/10 ; G01L9/00 ; G01R33/09 ; G01R33/07

Abstract:
A pressure sensor comprises a deformable substrate, at least one coil supported by the substrate and responsive to a changing coil drive signal to produce a changing magnetic field, a fluid chamber having a first wall formed by the substrate and a second wall formed by a conductive material and positioned proximate to the at least one coil so that the changing magnetic field produces eddy currents within the conductive material that generate a reflected magnetic field, and at least one magnetic field sensing element configured to detect the reflected magnetic field and produce a signal responsive to a distance between the magnetic field sensing element and the second wall. The substrate is deformable by fluid pressure within the fluid chamber and the deformation of the substrate changes the distance between the magnetic field sensing element and the second wall.
Public/Granted literature
- US20200333203A1 COIL ACTUATED PRESSURE SENSOR AND DEFORMABLE SUBSTRATE Public/Granted day:2020-10-22
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