- 专利标题: Extreme ultraviolet light generating apparatus and method of manufacturing electronic device
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申请号: US16938895申请日: 2020-07-24
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公开(公告)号: US10959317B1公开(公告)日: 2021-03-23
- 发明人: Akihiro Takayama
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 代理机构: Studebaker & Brackett PC
- 优先权: JPJP2019-162392 20190905
- 主分类号: H05G2/00
- IPC分类号: H05G2/00 ; G03F7/20
摘要:
An EUV light generating apparatus includes: a chamber device including an inner wall surrounding a space, and a plasma generating region in the space in which plasma is generated from a droplet irradiated with a laser beam; a heat shield including a through-hole and a channel portion, and disposed between the inner wall and the plasma generating region; a gas supply device that supplies gas; a gas introducing cylinder that is provided in the space on a side opposite to the plasma generating region, extends toward the through-hole, and introduces the gas supplied from the gas supply device through the through-hole toward the plasma generating region over the heat shield; and an optical unit optically coupled to the space through an internal space of the gas introducing cylinder and the through-hole. An entire front end surface of the gas introducing cylinder faces the heat shield.
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