- 专利标题: Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
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申请号: US16679500申请日: 2019-11-11
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公开(公告)号: US10967400B2公开(公告)日: 2021-04-06
- 发明人: Susan A. Alie , Keith G. Fife , Joseph Lutsky , David Grosjean
- 申请人: Butterfly Network, Inc.
- 申请人地址: US CT Guilford
- 专利权人: Butterfly Network, Inc.
- 当前专利权人: Butterfly Network, Inc.
- 当前专利权人地址: US CT Guilford
- 代理机构: Wolf, Greenfield & Sacks, P.C.
- 主分类号: B06B1/02
- IPC分类号: B06B1/02 ; B81C1/00 ; G01N29/24 ; B81B3/00 ; G01N29/22
摘要:
An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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