- 专利标题： Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device
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申请号： US16309697申请日： 2017-06-22
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公开(公告)号： US10969259B2公开(公告)日： 2021-04-06
- 发明人: Yohei Sawada , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
- 申请人： FUJIKIN INCORPORATED
- 申请人地址： JP Osaka
- 专利权人： FUJIKIN INCORPORATED
- 当前专利权人： FUJIKIN INCORPORATED
- 当前专利权人地址： JP Osaka
- 代理机构： Studebaker & Brackett PC
- 优先权： JPJP2016-132948 20160705
- 国际申请： PCT/JP2017/023013 WO 20170622
- 国际公布： WO2018/008420 WO 20180111
- 主分类号： G01F1/42
- IPC分类号： G01F1/42 ; G05D7/00 ; G01F15/00 ; G01F25/00 ; G01F1/36
摘要：
In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.
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