- 专利标题： System and method for producing an optical mask for surface treatment, and surface treatment plant and method
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申请号： US16311287申请日： 2017-06-21
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公开(公告)号： US10969678B2公开(公告)日： 2021-04-06
- 发明人: Maxime Bichotte , Yves Jourlin , Laurent Dubost
- 申请人： H.E.F. , UNIVERSITE JEAN MONNET SAINT ETIENNE , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- 申请人地址： FR Andrezieux Boutheon; FR Saint Etienne; FR Paris
- 专利权人： H.E.F.,UNIVERSITE JEAN MONNET SAINT ETIENNE,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- 当前专利权人： H.E.F.,UNIVERSITE JEAN MONNET SAINT ETIENNE,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- 当前专利权人地址： FR Andrezieux Boutheon; FR Saint Etienne; FR Paris
- 代理机构： Meunier Carlin & Curfman LLC
- 优先权： FR1655751 20160621
- 国际申请： PCT/FR2017/051648 WO 20170621
- 国际公布： WO2017/220929 WO 20171228
- 主分类号： G03F1/68
- IPC分类号： G03F1/68
摘要：
The invention relates to a system (2) for producing an optical mask (35) for surface treatment, in particular surface microtexturing, said system (2) comprising: a layer of material (20) which has an outer surface (21) that is exposed to the outside environment; and a generating and depositing device for generating and depositing droplets (30) on the outer surface (21) of the layer of material (20) in which a specific arrangement (31), forming the optical mask (35) on the outer surface (21) of the layer of material (20). The invention also relates to a treatment plant comprising a system (2) of said type. The invention further relates to a method for producing a mask as well as to a method for surface treatment.
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