Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices and method of manufacturing the same
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Application No.: US16265688Application Date: 2019-02-01
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Publication No.: US10971513B2Publication Date: 2021-04-06
- Inventor: Bongyong Lee , Tae Hun Kim , Minkyung Bae
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2018-0082357 20180716
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/11582 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; G11C16/04

Abstract:
A three-dimensional (3D) semiconductor memory device may include a stack structure including gate electrodes sequentially stacked on a substrate, and a vertical channel penetrating the stack structure. The gate electrodes may include a ground selection gate electrode, a cell gate electrode, a string selection gate electrode, and an erase gate electrode, which are sequentially stacked on the substrate.
Public/Granted literature
- US20200020717A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-01-16
Information query
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