Abstract:
Disclosed are semiconductor memory devices and electronic systems including the same. The semiconductor memory device may include a vertical channel perpendicular to a top surface of a substrate, word lines disposed on a first side of the vertical channel and vertically stacked on the substrate, back-gate electrodes disposed on a second side of the vertical channel and vertically stacked on the substrate, a ferroelectric layer disposed between the word lines and the first side of the vertical channel, a first intermediate insulating layer disposed between the ferroelectric layer and the first side of the vertical channel, and a second intermediate insulating layer disposed between the back-gate electrodes and the second side of the vertical channel.
Abstract:
A three-dimensional semiconductor memory device may include a stack including gate electrodes sequentially stacked on a substrate and a vertical structure penetrating the stack. The vertical structure may include a vertical channel portion, a charge storing structure on an outer side surface of the vertical channel portion, and a pad. The pad may include a first pad portion disposed in an internal space surrounded by the vertical channel portion and a second pad portion provided on the first pad portion and extended onto a top surface of the charge storing structure. A portion of the first pad portion may be disposed at the same level as an uppermost electrode of the gate electrodes.
Abstract:
A semiconductor device includes a source layer; a plurality of channel structures; a plurality of gate electrodes; and a common source line. At least one of the plurality of gate electrodes provides a GIDL line. For an erasing operation, an erasing voltage applied to the common source line reaches a target voltage, and, after the erasing voltage reaches the target voltage, a step increment voltage is applied to the erasing voltage, such that the erasing voltage has a voltage level higher than a voltage level of the target voltage. After the step increment voltage has been applied for a desired time period, the voltage level of the erasing voltage is decreased to the target voltage level for the remainder of the erasing operation.
Abstract:
An operating method of a nonvolatile memory device which includes a cell string including a plurality of cell transistors connected in series between a bit line and a common source line and stacked in a direction perpendicular to a substrate, the method including: programming an erase control transistor of the plurality of cell transistors; and after the erase control transistor is programmed, applying an erase voltage to the common source line or the bit line and applying an erase control voltage to an erase control line connected to the erase control transistor, wherein the erase control voltage is less than the erase voltage and greater than a ground voltage, and wherein the erase control transistor is between a ground selection transistor of the plurality of cell transistors and the common source line or between a string selection transistor of the plurality of cell transistors and the bit line.
Abstract:
Memory devices include a plurality of elongate gate stacks extending in parallel on a substrate and at least one insulation region disposed in a trench between adjacent ones of the gate stacks. The at least one insulation region has linear first portions having a first width and widened second portions having a second width greater than the first width. A common source region is disposed in the substrate underlying the at least one insulation region. The devices further include respective conductive plugs passing through respective ones of the widened second portions of the at least one insulation region and electrically connected to the common source region and at least one strapping line disposed on the conductive plugs between the adjacent ones of the gate stacks and in direct contact with the conductive plugs.
Abstract:
A three-dimensional semiconductor memory device may include a substrate comprising a cell array region and a connection region, an electrode structure including a plurality of gate electrodes sequentially stacked on a surface of the substrate and extending from the cell array region to the connection region, a first source conductive pattern between the electrode structure and the substrate on the cell array region, and a cell vertical semiconductor pattern and a first dummy vertical semiconductor pattern that penetrate the electrode structure and the first source conductive pattern and extend into the substrate. The cell vertical semiconductor pattern may contact the first source conductive pattern. The first dummy vertical semiconductor pattern may be electrically insulated from the first source conductive pattern.
Abstract:
A three-dimensional semiconductor memory device may include a substrate comprising a cell array region and a connection region, an electrode structure including a plurality of gate electrodes sequentially stacked on a surface of the substrate and extending from the cell array region to the connection region, a first source conductive pattern between the electrode structure and the substrate on the cell array region, and a cell vertical semiconductor pattern and a first dummy vertical semiconductor pattern that penetrate the electrode structure and the first source conductive pattern and extend into the substrate. The cell vertical semiconductor pattern may contact the first source conductive pattern. The first dummy vertical semiconductor pattern may be electrically insulated from the first source conductive pattern.
Abstract:
A three-dimensional semiconductor memory device includes common source regions, an electrode structure between the common source regions, first channel structures penetrating the electrode structure, and second channel structures between the first channel structures and penetrating the electrode structures. The electrode structure includes electrodes vertically stacked on a substrate. The first channel structures include a first semiconductor pattern and a first vertical insulation layer. The second channel structures include a second vertical insulation layer surrounding a second semiconductor pattern. The second vertical insulation layer has a bottom surface lower than a bottom surface of the first vertical insulation layer.
Abstract:
A semiconductor memory device includes a back gate electrode, a gate electrode on the back gate electrode, a channel layer between the gate electrode and the back gate electrode, a gate insulating layer between the channel layer and the gate electrode, and a ferroelectric layer between the back gate electrode and the channel layer.
Abstract:
A three-dimensional (3D) semiconductor memory device may include a stack structure including gate electrodes sequentially stacked on a substrate, and a vertical channel penetrating the stack structure. The gate electrodes may include a ground selection gate electrode, a cell gate electrode, a string selection gate electrode, and an erase gate electrode, which are sequentially stacked on the substrate.