Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16816423Application Date: 2020-03-12
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Publication No.: US10971528B2Publication Date: 2021-04-06
- Inventor: Hajime Kimura , Tsutomu Murakawa , Kosei Nei , Hiroaki Honda , Yusuke Shino
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JPJP2017-059440 20170324
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L21/84 ; H01L27/06 ; H01L21/8258 ; G11C11/405 ; G11C11/404

Abstract:
A semiconductor device which can suppress leakage current between a wiring and a connection electrode connected to a floating node is provided. The semiconductor device includes a first insulator, a first conductor over the first insulator, a second conductor over the first insulator, and a second insulator over the first insulator, the first conductor, and the second conductor. The first conductor and the second conductor contain a metal A (one kind or a plurality of kinds of aluminum, copper, tungsten, chromium, silver, gold, platinum, tantalum, nickel, molybdenum, magnesium, beryllium, indium, and ruthenium). The metal A is detected in an interface between the first insulator and the second insulator by an energy dispersive X-ray spectroscopy (EDX). The second insulator includes a groove for exposing the first insulator between the first conductor and the second conductor.
Public/Granted literature
- US20200273886A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-08-27
Information query
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