Invention Grant
- Patent Title: Double height cell regions, semiconductor device having the same, and method of generating a layout diagram corresponding to the same
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Application No.: US16204474Application Date: 2018-11-29
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Publication No.: US10971586B2Publication Date: 2021-04-06
- Inventor: Jung-Chan Yang , Ting-Wei Chiang , Hui-Zhong Zhuang , Lee-Chung Lu , Li-Chun Tien
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/092 ; H01L27/02 ; H01L21/033 ; H01L29/66 ; H01L29/78 ; H01L21/8238 ; G06F30/392

Abstract:
In at least one cell region, a semiconductor device includes fins and at least one overlying gate structure. The fins (dummy and active) are substantially parallel to a first direction. Each gate structure is substantially parallel to a second direction (which is substantially perpendicular to the first direction). First and second active fins have corresponding first and second conductivity types. Each cell region, relative to the second direction, includes: a first active region which includes a sequence of three or more consecutive first active fins located in a central portion of the cell region; a second active region which includes one or more second active fins located between the first active region and a first edge of the cell region; and a third active region which includes one or more second active fins located between the first active region and a second edge of the cell region.
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