- 专利标题： Meta-optical device and method of manufacturing the same
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申请号： US15805864申请日： 2017-11-07
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公开(公告)号： US10976472B2公开(公告)日： 2021-04-13
- 发明人: Jeongyub Lee , Changseung Lee , Yongsung Kim , Jaekwan Kim , Byonggwon Song , Sanghoon Song , Kiyeon Yang
- 申请人： SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址： KR Suwon-si
- 专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址： KR Suwon-si
- 代理机构： Sughrue Mion, PLLC
- 优先权： KR10-2017-0015694 20170203
- 主分类号： G02B1/02
- IPC分类号： G02B1/02 ; G02B1/00 ; C23C14/58 ; C23C14/06 ; C23C14/34 ; C23C16/40 ; G02B3/00 ; C23C16/50
摘要：
A meta-optical device and a method of manufacturing the same are provided. The method includes depositing a group III-V compound semiconductor on a substrate, forming an anti-oxidation layer, performing crystallization by using post annealing, removing the anti-oxidation layer, and manufacturing a meta-optical device by using patterning.
公开/授权文献
- US20180224574A1 META-OPTICAL DEVICE AND METHOD OF MANUFACTURING THE SAME 公开/授权日：2018-08-09
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