Invention Grant
- Patent Title: MEMS transducer system for pressure and acoustic sensing
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Application No.: US16464200Application Date: 2017-11-27
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Publication No.: US10981777B2Publication Date: 2021-04-20
- Inventor: Andrew Doller , Gokhan Hatipoglu , Yujie Zhang , Bernhard Gehl , Daniel Christoph Meisel
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- International Application: PCT/EP2017/080461 WO 20171127
- International Announcement: WO2018/096130 WO 20180531
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
A MEMS transducer system includes a MEMS transducer device for sensing at least one of pressure signal or acoustic signal. The MEMS transducer device includes first and second diaphragms. Formed between the diaphragms are a spacer, plate capacitor elements, and electrode elements. The plate capacitor elements are coupled to the diaphragms via the spacer. An optional member may be disposed within the spacer. The distal ends of the electrode elements are coupled to a structure such as insulator element. An optional oxides may be formed within the plate capacitor elements. Pressure sensing electrode formed between the diaphragms may be coupled to the insulator element.
Public/Granted literature
- US20190389721A1 MEMS Transducer System for Pressure and Acoustic Sensing Public/Granted day:2019-12-26
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