Invention Grant
- Patent Title: Pumping system
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Application No.: US16117886Application Date: 2018-08-30
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Publication No.: US10982662B2Publication Date: 2021-04-20
- Inventor: Ian David Stones , Malcolm William Gray , Iain David Port
- Applicant: Edwards Limited
- Applicant Address: GB Burgess Hill
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Burgess Hill
- Agency: Shumaker & Sieffert, P.A.
- Priority: GB1302530 20130213
- Main IPC: F04B37/14
- IPC: F04B37/14 ; F04B41/02 ; F04B41/06

Abstract:
A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.
Public/Granted literature
- US20180372081A1 PUMPING SYSTEM Public/Granted day:2018-12-27
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