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公开(公告)号：US12098713B2
公开(公告)日：2024-09-24
申请号：US17349529
申请日：2021-06-16
发明人： Jianyi Huang
CPC分类号： F04B37/14 , B05B11/1069 , F04B53/14 , F04B53/162 , B05B11/1023 , B05B11/1077
摘要： A vacuum pump including: a pump body that includes an elastic sleeve; a valve stem; a valve pin that is surrounded by the valve stem with an end of the valve pin snap fitted to the valve stem; a piston that surrounds the valve pin and that is located inside of the pump body and sealed against the pump body; a plug; a ring that surrounds the pump body and the plug; a head cap that surrounds the valve stem and that is configured to move within a cavity of the ring; and a spring disposed between the valve stem and the stepped groove of the plug at a position radially outward of the valve stem.
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公开(公告)号：US12006935B2
公开(公告)日：2024-06-11
申请号：US17905998
申请日：2021-03-09
发明人： Simon Candries , Yun Shi
IPC分类号： F04C25/02 , F04B35/04 , F04B37/14 , F04B49/06 , F04C28/06 , F04C28/08 , F04D19/04 , F04D27/00 , F04D27/02
CPC分类号： F04C25/02 , F04B35/04 , F04B37/14 , F04B49/065 , F04C28/06 , F04C28/08 , F04D19/04 , F04D27/001 , F04D27/004 , F04D27/0261 , F04B2203/0209 , F04C2220/10 , F04C2270/051 , F04C2270/23 , F05D2270/3011
摘要： Repeated cycles each consist of a pump down phase and a holding phase, wherein a start timepoint of each cycle is the timepoint when a rise in an inlet pressure of the pump is sufficiently large and the time extending between two consecutive cycle start timepoints is a cycle time. A control method includes determining a start of a next cycle during a present cycle, wherein it is preferable that the present cycle directly precedes the next cycle. The method further includes controlling the pump to accelerate to a maximum allowed speed during the holding phase of the present cycle before the start of the next cycle such that at the start of the next cycle full pump capacity is available.
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公开(公告)号：US11929982B2
公开(公告)日：2024-03-12
申请号：US17297302
申请日：2019-11-12
申请人： Edwards Limited
发明人： Peter Reginald Crundwell , Richard John Moran , Peter George Stammers , Steven Graham Barlow , Brent Haslett
IPC分类号： H04L61/5038 , F04B37/14 , F04B49/06 , G05B19/418 , G06F15/177
CPC分类号： H04L61/5038 , G05B19/41845 , G05B19/41855 , G06F15/177 , F04B37/14 , F04B49/065
摘要： A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.
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公开(公告)号：US11920576B2
公开(公告)日：2024-03-05
申请号：US17188408
申请日：2021-03-01
发明人： Takahiro Yatsu
CPC分类号： F04B37/08 , F04B37/14 , F04B49/065 , F04B2201/0801 , F05B2210/12
摘要： A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.
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公开(公告)号：US11719231B2
公开(公告)日：2023-08-08
申请号：US16463602
申请日：2017-11-10
申请人： Leybold GmbH
CPC分类号： F04B37/14 , F04B35/04 , F04B49/065 , F04B49/20 , F04C25/02 , F04C28/08 , F04C28/24 , F04B2201/021 , F04B2201/0601 , F04B2201/0604 , F04B2203/0201 , F04B2203/0209 , F04B2203/0211
摘要： A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.
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公开(公告)号：US20230220843A1
公开(公告)日：2023-07-13
申请号：US17996570
申请日：2021-04-22
申请人： Edwards Limited
CPC分类号： F04B49/065 , F04B37/14 , F04B51/00
摘要： A method of controlling monitoring of a vacuum system, the vacuum system, and the monitoring control system are disclosed. The method comprises: selecting at least one of a plurality of processes for monitoring the vacuum system from a data store storing the plurality of processes. Executing the at least one selected process Wherein one of the at least one selected processes comprises a process for monitoring a parameter of the vacuum system and for responding to changes in the parameter to trigger at least one of: execution of a further one of the plurality of processes; output of an alarm or notification signal; and output of a control signal for controlling operation of at least one component of the vacuum system.
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公开(公告)号：US11569077B2
公开(公告)日：2023-01-31
申请号：US16629528
申请日：2018-07-11
申请人： SRI International
发明人： Sterling Eduardo McBride , Joey J. Michalchuk , Christopher E. Holland , Ashish Chaudhary , Winston K. Chan
IPC分类号： H01J41/20 , F04B37/14 , H01J41/12 , H01J9/02 , H01J1/304 , H01J41/00 , H01J1/30 , H01J41/14 , H01J41/16 , H01J41/04 , H02K44/00 , B03C3/40 , G01L21/34 , F04B37/02 , B03C3/41
摘要： The disclosure includes an outer electrode and an inner electrode. The outer electrode defines an inner volume and is configured to receive injected electrons through at least one aperture. The inner electrode positioned in the inner volume. The outer electrode and inner electrode are configured to confine the received electrons in orbits around the inner electrode in response to an electric potential between the outer electrode and the inner electrode. The apparatus does not include a component configured to generate an electron-confining magnetic field.
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公开(公告)号：US11542932B2
公开(公告)日：2023-01-03
申请号：US16763516
申请日：2018-11-08
申请人： Edwards Limited
IPC分类号： F16L53/35 , F04B37/14 , F04B39/12 , F04B39/14 , F04C25/02 , F04B41/00 , F16L51/04 , F04C23/00 , F16L23/08 , C23C16/44
摘要： A vacuum system pipe coupling includes a first coupling member defining a through passage, a second coupling member defining a through passage and a securing unit. The first coupling member has a first end portion having a first lengthways extending axis, a second end portion having a second lengthways extending axis that is laterally offset with respect to the first lengthways extending axis and a first connecting portion connecting the first and second end portions. The second coupling member has a third end portion having a third lengthways extending axis, a fourth end portion having a fourth lengthways extending axis that is laterally offset with respect to the third lengthways extending axis and a second connecting portion connecting the third and fourth end portions. The securing unit is configured to secure the first end portion to the third end portion with the first and third lengthways extending axes in alignment.
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公开(公告)号：US11519778B2
公开(公告)日：2022-12-06
申请号：US17386011
申请日：2021-07-27
发明人： Shuichi Iguchi
摘要： A monitoring device is attached to a first leg portion and detects vibration generated in the first leg portion. The monitoring device includes a sensor unit including an inertial sensor, a plate for attachment of the sensor unit, a spacer in contact with the first leg portion, and a bolt for fixation, and is attached to the first leg portion by the bolt with the spacer, the plate, and the sensor sequentially stacked and the spacer is softer than the plate.
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公开(公告)号：US11512686B2
公开(公告)日：2022-11-29
申请号：US16841389
申请日：2020-04-06
发明人： Peter Lucon , Emily Maynard , Grace Ostermiller
摘要： Provided herein is a mechanical resonant system, comprising a frame; at least one pump disposed on the frame; one or two masses coupled to the frame by a first plurality of resilient members; and at least one voice coil actuator disposed within the frame and coupled to the at least one pump or to the one or two masses; wherein when the system comprises two masses, a second plurality of resilient members couple the masses to each other. Also provided are methods for using these mechanical resonant systems to evacuate a chamber, to compress air, or sense changes in pressure.
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