- 专利标题： Method of manufacturing inductors in BEOL with particulate magnetic cores
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申请号： US15801926申请日： 2017-11-02
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公开(公告)号： US10984948B2公开(公告)日： 2021-04-20
- 发明人: Chandrasekharan Kothandaraman , Eugene J. O'Sullivan , Naigang Wang
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 代理机构： Tutunjian & Bitetto, P.C.
- 代理商 Daniel Morris
- 主分类号： H01F41/04
- IPC分类号： H01F41/04 ; H01F41/02 ; H01F27/32 ; H01F5/00 ; H01F27/29 ; H01F27/02 ; H01F27/34 ; H01F27/255 ; H01F27/28 ; H01F3/08 ; H01F1/00 ; H01F1/09
摘要：
A method for forming an inductor device. The method comprises forming a trench within a central core region of a conductive coil formed within a dielectric material. The method further comprises forming a composite region within the trench. The composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed therein with the central core region to reduce eddy current loss and increase energy storage.
公开/授权文献
- US20180218824A1 INDUCTORS IN BEOL WITH PARTICULATE MAGNETIC CORES 公开/授权日：2018-08-02
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