- Patent Title: Method for transferring semiconductor bodies and semiconductor chip
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Application No.: US16488571Application Date: 2018-03-06
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Publication No.: US10985292B2Publication Date: 2021-04-20
- Inventor: Lutz Höppel
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE Regensburg
- Agency: Slater Matsil, LLP
- Priority: DE102017104752.2 20170307
- International Application: PCT/EP2018/055448 WO 20180306
- International Announcement: WO2018/162464 WO 20180913
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L23/58 ; H01L33/00 ; H01L33/56 ; H01L33/62

Abstract:
A method for transferring semiconductor bodies and a semiconductor chip are disclosed. In an embodiment a method includes providing a semiconductor structure on a growth substrate, arranging a cover layer on a side of the semiconductor structure facing away from the growth substrate, wherein the cover layer is mechanically fixedly connected to the semiconductor structure, arranging a transfer structure on a side of the cover layer facing away from the semiconductor structure, wherein the transfer structure is mechanically fixedly connected to the cover layer via at least one contact structure, wherein a sacrificial layer is arranged between the cover layer and the transfer structure, and wherein the sacrificial layer does not cover any of the at least one contact structure, removing the growth substrate from the semiconductor structure, subdividing the semiconductor structure into a plurality of semiconductor bodies, arranging a carrier on a side of the semiconductor body facing away from the transfer structure, selectively removing the sacrificial layer and removing the transfer structure from the semiconductor bodies.
Public/Granted literature
- US20200035855A1 Method for Transferring Semiconductor Bodies and Semiconductor Chip Public/Granted day:2020-01-30
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