Invention Grant
- Patent Title: Scatterometry system and method of using the same
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Application No.: US16611051Application Date: 2018-05-03
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Publication No.: US10989656B2Publication Date: 2021-04-27
- Inventor: Matthew R. C. Atkinson
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- International Application: PCT/IB2018/053093 WO 20180503
- International Announcement: WO2018/203282 WO 20181108
- Main IPC: G01N21/47
- IPC: G01N21/47
Abstract:
Microscatterometry system for generating an angularly resolved scattered light profile from the collected data.
Information query
