Invention Grant
- Patent Title: Plasma processing device
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Application No.: US16172863Application Date: 2018-10-29
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Publication No.: US10991555B2Publication Date: 2021-04-27
- Inventor: Soo Beom Jo , Hae Young Yoo , Ju Hee Lee , Yong Mun Chang , Myung Soo Huh
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2018-0002803 20180109
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/3065

Abstract:
A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.
Public/Granted literature
- US20190214233A1 PLASMA PROCESSING DEVICE Public/Granted day:2019-07-11
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