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    Deposition apparatus and deposition method
    2.
    发明授权
    Deposition apparatus and deposition method 有权

    公开(公告)号：US10679858B2

    公开(公告)日：2020-06-09

    申请号：US16163629

    申请日：2018-10-18

    Applicant: Samsung Display Co., Ltd.

    Inventor： Dong Kyun Ko ,  Woo Jin Kim ,  Myung Soo Huh ,  In Kyo Kim ,  Keun Hee Park

    IPC: H01L21/28 ,  C23C16/448 ,  C23C16/452 ,  C23C16/455 ,  H01L29/51

    Abstract: A deposition apparatus includes a chamber, a susceptor that supports a substrate in the chamber, an upper electrode facing the susceptor, a showerhead defining a gas inlet space between the upper electrode and the susceptor, a metal source storage to store a metal source supplied to the chamber, a vaporizer to vaporize the metal source, a first gas source to supply a first gas to move the metal source toward the vaporizer, a second gas source to supply a second gas to move the metal source in the vaporizer toward the chamber, a third gas source connected to the chamber to supply a third gas into a reaction space defined between the susceptor and the upper electrode such that the third gas reacts with the metal source, and a fourth gas source connected to the chamber to supply a fourth gas used to clean an inside of the chamber.

    Inkjet printing apparatus
    5.
    发明授权
    Inkjet printing apparatus 有权

    公开(公告)号：US12194746B2

    公开(公告)日：2025-01-14

    申请号：US17974633

    申请日：2022-10-27

    Applicant: Samsung Display Co., LTD.

    Inventor： Jeong Won Han ,  Jongho Park ,  Taeho Yang ,  Myung Soo Huh

    IPC: B41J2/14 ,  B41J2/055 ,  B41J2/145 ,  B41J2/175

    Abstract: An inkjet printing apparatus according to an embodiment includes a stage where a target substrate is disposed, and an inkjet head that discharges ink on the target substrate. The inkjet head includes a tank that stores the ink, nozzles that are provided on the tank and discharge the ink, and a damper that is disposed in the tank, and the damper comprises a protruding portion that protrudes toward the nozzles from the damper.

    Inkjet printing apparatus, dipole alignment method, and display device manufacturing method
    6.
    发明授权
    Inkjet printing apparatus, dipole alignment method, and display device manufacturing method 有权

    公开(公告)号：US12004412B2

    公开(公告)日：2024-06-04

    申请号：US17278126

    申请日：2019-04-08

    Applicant: Samsung Display Co., LTD.

    Inventor： Heung Cheol Jeong ,  Byung Chul Lee ,  Myung Soo Huh ,  Jin Oh Kwag ,  Do Hun Lee

    IPC: H10K71/13

    CPC classification number: H10K71/135

    Abstract: An inkjet printing apparatus, a dipole alignment method, and a display device manufacturing method are provided. The inkjet printing apparatus includes a stage, a print head part disposed above the stage, and an electric field generating part that provides an electric field to a space between the stage and the print head part. The dipole alignment method includes providing an electric field at an area above a target substrate, spraying ink including a dipole onto the target substrate through the area, and landing the dipole on the target substrate. The display device manufacturing method includes preparing a base layer on which first and second electrodes are disposed, spraying ink including a light emitting element onto the base layer through the area, landing the light emitting element between the first and second electrodes.

    Inkjet print apparatus
    7.
    发明授权
    Inkjet print apparatus 有权

    公开(公告)号：US11370218B2

    公开(公告)日：2022-06-28

    申请号：US17150521

    申请日：2021-01-15

    Applicant: Samsung Display Co., LTD.

    Inventor： Futoshi Yoshida ,  Cheong Wan Min ,  Min A Han ,  Jae Bum Pahk ,  Jeong Ho Yi ,  Heung Cheol Jeong ,  Myung Soo Huh

    IPC: B41J2/045 ,  B41J2/175 ,  B41J2/18 ,  B41J2/14

    Abstract: An inkjet print apparatus includes a print head discharging ink onto a substrate, the print head including a first heater; a reservoir storing the ink; a first pipe supplying the ink to the reservoir; a second pipe collecting surplus ink; a mixing unit located on the first pipe and mixing the ink; a pump located on the second pipe and pressurizing and supplying the surplus ink to the reservoir; a temperature sensor located between the mixing unit and the print head and sensing a temperature of the ink; and a controller controlling a temperature of at least one of the first heater and the second heater in response to information received from the temperature sensor. The print head includes a heat insulator blocking heat emitted from the first heater between the substrate and the first heater.

    Plasma processing device
    8.
    发明授权
    Plasma processing device 有权

    公开(公告)号：US10991555B2

    公开(公告)日：2021-04-27

    申请号：US16172863

    申请日：2018-10-29

    Applicant: Samsung Display Co., Ltd.

    Inventor： Soo Beom Jo ,  Hae Young Yoo ,  Ju Hee Lee ,  Yong Mun Chang ,  Myung Soo Huh

    IPC: H01J37/32 ,  H01L21/3065

    Abstract: A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.

    Inkjet printing device, dipole aligning method, and display device manufacturing method
    10.
    发明授权
    Inkjet printing device, dipole aligning method, and display device manufacturing method 有权

    公开(公告)号：US11685154B2

    公开(公告)日：2023-06-27

    申请号：US17420438

    申请日：2019-03-13

    Applicant: Samsung Display Co., LTD.

    Inventor： Byung Chui Lee ,  Heung Cheol Jeong ,  Myung Soo Huh ,  Min Soo Kim ,  Jae Ha Lim

    IPC: B41J2/045

    CPC classification number: B41J2/04558 ,  B41J2/0456 ,  B41J2/04586

    Abstract: An inkjet printing device includes a stage part including a stage, an inkjet head part including at least one inkjet head that disposes an ink on the stage, the ink including dipoles and a solvent having the dipoles, a heat treatment device that removes the solvent, a first sensing part that measures a position of the ink disposed on the stage, a second sensing part that measures a position of the inkjet head, and a third sensing part that measures a position of each of the dipoles disposed on the stage. A dipole aligning method includes disposing an ink on a substrate, the ink including dipoles and a solvent having the dipoles, generating an electric field on the substrate and disposing the dipoles on the substrate by the electric field, removing the solvent, and measuring a position of each of the dipoles disposed on the substrate.

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