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公开(公告)号:US12194735B2
公开(公告)日:2025-01-14
申请号:US17853693
申请日:2022-06-29
Applicant: Samsung Display Co., Ltd.
Inventor: Jeong Won Han , Myung Soo Huh
IPC: B41J11/06 , B41J2/01 , B41J2/11 , B41J3/407 , B41J11/00 , B41J25/00 , G02F1/13 , H10K71/13 , B41J2/165
Abstract: An inkjet printing apparatus may form a material layer on a substrate. The inkjet printing apparatus includes a stage, an ink-receiving member, and an inkjet head. The stage may support the substrate. The inkjet head overlaps at least one of the stage and the ink-receiving member, may provide a first set of ink to the substrate, and may provide a second set of ink to the ink-receiving member when the substrate is supported by the stage.
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公开(公告)号:US10679858B2
公开(公告)日:2020-06-09
申请号:US16163629
申请日:2018-10-18
Applicant: Samsung Display Co., Ltd.
Inventor: Dong Kyun Ko , Woo Jin Kim , Myung Soo Huh , In Kyo Kim , Keun Hee Park
IPC: H01L21/28 , C23C16/448 , C23C16/452 , C23C16/455 , H01L29/51
Abstract: A deposition apparatus includes a chamber, a susceptor that supports a substrate in the chamber, an upper electrode facing the susceptor, a showerhead defining a gas inlet space between the upper electrode and the susceptor, a metal source storage to store a metal source supplied to the chamber, a vaporizer to vaporize the metal source, a first gas source to supply a first gas to move the metal source toward the vaporizer, a second gas source to supply a second gas to move the metal source in the vaporizer toward the chamber, a third gas source connected to the chamber to supply a third gas into a reaction space defined between the susceptor and the upper electrode such that the third gas reacts with the metal source, and a fourth gas source connected to the chamber to supply a fourth gas used to clean an inside of the chamber.
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公开(公告)号:US09890454B2
公开(公告)日:2018-02-13
申请号:US14531170
申请日:2014-11-03
Applicant: Samsung Display Co., Ltd.
Inventor: Choel Min Jang , Suk Won Jung , Myung Soo Huh
IPC: C23C16/455 , C23C16/44 , C23C16/458
CPC classification number: C23C16/45544 , C23C16/4409 , C23C16/45525 , C23C16/45563 , C23C16/45565 , C23C16/45574 , C23C16/458 , C23C16/4585
Abstract: An atomic layer deposition apparatus includes: a substrate support supporting a substrate; a first divider including a plurality of first division modules provided on the substrate support and selectively spraying a source gas, a reaction gas, and a purge gas to each of predetermined areas; and a second divider including a plurality of second division modules provided on the first divider and supplying the gases to the respective first division modules, wherein each of the plurality of second division modules is formed of a first through-hole and a second through-hole, and the gas passed through the first and second through-holes moves to the first division modules.
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公开(公告)号:US09809880B2
公开(公告)日:2017-11-07
申请号:US14444231
申请日:2014-07-28
Applicant: Samsung Display Co. Ltd.
Inventor: Choel Min Jang , In Kyo Kim , Suk Won Jung , Myung Soo Huh
IPC: C23C16/00 , C23C16/44 , C23C16/455 , C23C16/54
CPC classification number: C23C16/45546 , C23C16/45502 , C23C16/45527 , C23C16/45548 , C23C16/45578 , C23C16/545
Abstract: An atomic layer deposition apparatus includes a first base plate on which a seat portion is defined to allow a substrate to be seated thereon, a second base plate disposed opposite to the first base plate, a first gas nozzle portion arranged on the second base plate, a second gas nozzle portion arranged on the second base plate to be spaced apart from the first gas nozzle portion and substantially parallel to the first gas nozzle portion, and a gas storage portion connected to the first gas nozzle portion and the second gas nozzle portion.
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公开(公告)号:US12194746B2
公开(公告)日:2025-01-14
申请号:US17974633
申请日:2022-10-27
Applicant: Samsung Display Co., LTD.
Inventor: Jeong Won Han , Jongho Park , Taeho Yang , Myung Soo Huh
Abstract: An inkjet printing apparatus according to an embodiment includes a stage where a target substrate is disposed, and an inkjet head that discharges ink on the target substrate. The inkjet head includes a tank that stores the ink, nozzles that are provided on the tank and discharge the ink, and a damper that is disposed in the tank, and the damper comprises a protruding portion that protrudes toward the nozzles from the damper.
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公开(公告)号:US12004412B2
公开(公告)日:2024-06-04
申请号:US17278126
申请日:2019-04-08
Applicant: Samsung Display Co., LTD.
Inventor: Heung Cheol Jeong , Byung Chul Lee , Myung Soo Huh , Jin Oh Kwag , Do Hun Lee
IPC: H10K71/13
CPC classification number: H10K71/135
Abstract: An inkjet printing apparatus, a dipole alignment method, and a display device manufacturing method are provided. The inkjet printing apparatus includes a stage, a print head part disposed above the stage, and an electric field generating part that provides an electric field to a space between the stage and the print head part. The dipole alignment method includes providing an electric field at an area above a target substrate, spraying ink including a dipole onto the target substrate through the area, and landing the dipole on the target substrate. The display device manufacturing method includes preparing a base layer on which first and second electrodes are disposed, spraying ink including a light emitting element onto the base layer through the area, landing the light emitting element between the first and second electrodes.
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公开(公告)号:US11370218B2
公开(公告)日:2022-06-28
申请号:US17150521
申请日:2021-01-15
Applicant: Samsung Display Co., LTD.
Inventor: Futoshi Yoshida , Cheong Wan Min , Min A Han , Jae Bum Pahk , Jeong Ho Yi , Heung Cheol Jeong , Myung Soo Huh
Abstract: An inkjet print apparatus includes a print head discharging ink onto a substrate, the print head including a first heater; a reservoir storing the ink; a first pipe supplying the ink to the reservoir; a second pipe collecting surplus ink; a mixing unit located on the first pipe and mixing the ink; a pump located on the second pipe and pressurizing and supplying the surplus ink to the reservoir; a temperature sensor located between the mixing unit and the print head and sensing a temperature of the ink; and a controller controlling a temperature of at least one of the first heater and the second heater in response to information received from the temperature sensor. The print head includes a heat insulator blocking heat emitted from the first heater between the substrate and the first heater.
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公开(公告)号:US10991555B2
公开(公告)日:2021-04-27
申请号:US16172863
申请日:2018-10-29
Applicant: Samsung Display Co., Ltd.
Inventor: Soo Beom Jo , Hae Young Yoo , Ju Hee Lee , Yong Mun Chang , Myung Soo Huh
IPC: H01J37/32 , H01L21/3065
Abstract: A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.
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公开(公告)号:US12109806B2
公开(公告)日:2024-10-08
申请号:US17904370
申请日:2020-06-02
Applicant: Samsung Display Co., LTD.
Inventor: Byung Chul Lee , Heung Cheol Jeong , Myung Soo Huh , Cheol Lae Roh , Do Hun Lee
IPC: B41J2/045 , G01N15/1434 , G01N15/14
CPC classification number: B41J2/0451 , B41J2/04586 , G01N15/1434 , G01N2015/1486
Abstract: Provided are an inkjet printing apparatus and a method for inspecting an inkjet head using same. The inkjet printing apparatus comprises: an inspection stage unit on which an inspection substrate is seated; an inkjet head unit including at least one inkjet head that ejects ink containing dipoles and a solvent in which the dipoles disperse, on the inspection stage unit; and a particle count inspection unit that is located so as to be spaced apart from the inkjet head unit in one direction. The particle count inspection unit comprises: a first heat treatment unit that is located on the top portion of the inspection stage unit; and a first sensing unit that is located on the bottom portion of the inspection stage unit and measures the number of dipoles sprayed onto the inspection substrate.
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公开(公告)号:US11685154B2
公开(公告)日:2023-06-27
申请号:US17420438
申请日:2019-03-13
Applicant: Samsung Display Co., LTD.
Inventor: Byung Chui Lee , Heung Cheol Jeong , Myung Soo Huh , Min Soo Kim , Jae Ha Lim
IPC: B41J2/045
CPC classification number: B41J2/04558 , B41J2/0456 , B41J2/04586
Abstract: An inkjet printing device includes a stage part including a stage, an inkjet head part including at least one inkjet head that disposes an ink on the stage, the ink including dipoles and a solvent having the dipoles, a heat treatment device that removes the solvent, a first sensing part that measures a position of the ink disposed on the stage, a second sensing part that measures a position of the inkjet head, and a third sensing part that measures a position of each of the dipoles disposed on the stage. A dipole aligning method includes disposing an ink on a substrate, the ink including dipoles and a solvent having the dipoles, generating an electric field on the substrate and disposing the dipoles on the substrate by the electric field, removing the solvent, and measuring a position of each of the dipoles disposed on the substrate.
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