Invention Grant
- Patent Title: Microelectromechanical systems (MEMS) gyroscope calibration
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Application No.: US16221409Application Date: 2018-12-14
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Publication No.: US10996075B2Publication Date: 2021-05-04
- Inventor: Sriraman Dakshinamurthy , Doruk Senkal , Ali Shirvani , Ronak Chetan Desai , Carlo Pinna
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01C25/00
- IPC: G01C25/00 ; B81B3/00 ; B81B7/02 ; G01C19/56

Abstract:
Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.
Public/Granted literature
- US20190186950A1 MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPE CALIBRATION Public/Granted day:2019-06-20
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