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公开(公告)号：US20250070735A1
公开(公告)日：2025-02-27
申请号：US18237533
申请日：2023-08-24
Applicant: InvenSense, Inc.
Inventor： Federico Mazzarella , Vadim Tsinker
Abstract: In a microelectromechanical system (MEMS) sensor, movement of a component such as a proof mass due to a force of interest is sensed capacitively. A capacitance-to-voltage (C2V) converter receives a capacitance signal from the sensor and outputs a signal that includes an offset in addition to a signal of interest. The output signal is analyzed to identify the offset portion of the output signal and to modify values one or more variable capacitors coupled to the C2V input reduce the offset portion of the output signal.
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公开(公告)号：US12238481B2
公开(公告)日：2025-02-25
申请号：US18359242
申请日：2023-07-26
Applicant: INVENSENSE, INC.
Inventor： Tomas Pitak , Igor Mucha , Robert Dick , Michael Tuttle
IPC: H04R19/04
Abstract: Acoustic activity detection is provided herein. Operations of a method can include receiving an acoustic signal at a micro-electromechanical system (MEMS) microphone. Based on portions of the acoustic signal being determined to exceed a threshold signal level, output pulses are generated. Further, the method can include extracting information representative of a frequency of the acoustic signal based on respective spacing between rising edges of the output pulses.
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公开(公告)号：US12227409B2
公开(公告)日：2025-02-18
申请号：US17546928
申请日：2021-12-09
Applicant: InvenSense, Inc.
Inventor： Aurelio Pellegrini
Abstract: An inertial sensor such as a MEMS accelerometer or gyroscope has a proof mass that is driven by a self-test signal, with the response of the proof mass to the self-test signal being used to determine whether the sensor is within specification. The self-test signal is provided as a non-periodic self-test pattern that does not correlate with noise such as environmental vibrations that are also experienced by the proof mass during the self-test procedure. The sense output signal corresponding to the proof mass is correlated with the non-periodic self-test signal, such that an output correlation value corresponds only to the proof mass response to the applied self-test signal.
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公开(公告)号：US12199629B2
公开(公告)日：2025-01-14
申请号：US18107219
申请日：2023-02-08
Applicant: InvenSense, Inc.
Inventor： Omid Oliaei , Aurelio Pellegrini , Daniele Ottini
Abstract: A circuit for a feedback system incorporates a gating mechanism to reduce flicker noise (e.g., a source for bias instability within a MEMS device) at a digital output. The gating mechanism generates a gating pulse with a delay period (e.g., a common, or fixed, delay including symmetrical rising and falling edge delays) that overrides internal delays (e.g., asymmetrical rising and falling edge delays) of a phase generator to prevent propagation delay (e.g., delay affected by jitter) from reaching subsequent feedback components (e.g., a digital-to-analog converter (DAC)) and contributing to the generation of flicker noise within the system.
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公开(公告)号：US20240429324A1
公开(公告)日：2024-12-26
申请号：US18419301
申请日：2024-01-22
Applicant: InvenSense, Inc.
Inventor： Jotaro Akiyama , Yuki Shibano , Kento Kaneko , Daishi Arimatsu , Troy Chase
Abstract: A sensing device is formed on a first side of a wafer device, forming a cavity between sensing device and the wafer device. An opening of the cavity faces away from the sensing device, positioned on a second side of the wafer device (positioned opposite to the first side). A hydrophobic layer is formed on the second side of the wafer device, on the cavity, on an interior and on an exterior of the sensing device. A mask is formed on the hydrophobic layer on the second side. The mask is perforated that maintains at least a portion of the hydrophobic layer covering the second side of the wafer device exposed. Light is applied to the second side of the wafer device that removes the at least the portion of the hydrophobic layer covering the second side of the wafer device that is exposed. The mask is removed.
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Patent Agency Ranking
公开(公告)号：US20240426867A1
公开(公告)日：2024-12-26
申请号：US18214187
申请日：2023-06-26
Applicant: InvenSense, Inc.
Inventor： Matthew Julian Thompson , Roberto Martini
IPC: G01P15/125 , G01P21/00
Abstract: A MEMS sensor may include multiple sense electrodes located relative to respective portions of one or more proof masses of a MEMS layer of the sensor. Individual sense electrodes are capable of individual calibration within the drive and/or sense path for the sense electrode. A distance between each individual sense electrode relative to a proof mass is determined for the at-rest state of the sensor. Calibration values are determined based on these distances, and individual drive and/or sense signals associated with each sense electrode are modified to adjust for changes in distance, such as are caused by shifting, tilting, or bending of the MEMS layer or substrate.
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公开(公告)号：US12161507B2
公开(公告)日：2024-12-10
申请号：US18387043
申请日：2023-11-05
Applicant: InvenSense, Inc.
Inventor： Fabian T. Goericke , Richard J. Przybyla , Benjamin E. Eovino
Abstract: An ultrasonic transducer device comprises a piezoelectric micromachined ultrasonic transducer (PMUT), a transmitter with first and second differential outputs, and a controller. The PMUT includes a membrane layer. A bottom electrode layer, comprising a first bottom electrode and a second bottom electrode, is disposed above the membrane layer. The piezoelectric layer is disposed above the bottom electrode layer. The top electrode layer is disposed above the piezoelectric layer and comprises a segmented center electrode disposed above a center of the membrane layer and a segmented outer electrode spaced apart from the segmented center electrode. The controller, responsive to the PMUT being placed in a transmit mode, is configured to couple the first and second segments of the bottom electrode layer with ground, couple the first output of the transmitter with the segments of the segmented center electrode, and couple the second output with the segments of the segmented outer electrode.
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公开(公告)号：US12158460B2
公开(公告)日：2024-12-03
申请号：US17592800
申请日：2022-02-04
Applicant: INVENSENSE, INC.
Inventor： Mamdouh Yanni , Eiji Iwatsuki
Abstract: Environmental conditions affecting a sensor having a thermal coefficient are compensated by applying an adaptive filter to an environmental condition reference signal. The resulting adaptive cancellation signal may be used to provide feedback control to a first heating element.
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公开(公告)号：US12139397B2
公开(公告)日：2024-11-12
申请号：US17028552
申请日：2020-09-22
Applicant: INVENSENSE, INC.
Inventor： Daesung Lee , Alan Cuthbertson
Abstract: Selective self-assembled monolayer patterning with sacrificial layer for devices is provided herein. A sensor device can include a handle layer and a device layer that comprises a first side and a second side. First portions of the first side are operatively connected to defined portions of the handle layer. At least one area of the second side comprises an anti-stiction area formed with an anti-stiction coating. The device can also include a Complementary Metal-Oxide-Semiconductor (CMOS) wafer operatively connected to second portions of the second side of the device layer. The CMOS wafer comprises at least one bump stop. The anti-stiction area faces the at least one bump stop.
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10.发明公开公开(公告)号：US20240346380A1
公开(公告)日：2024-10-17
申请号：US18634510
申请日：2024-04-12
Applicant: InvenSense, Inc.
Inventor： Juan S. Mejia SANTAMARIA , Abbas ATAYA , Rémi Louis Clément PONÇOT
IPC: G06N20/00
CPC classification number: G06N20/00
Abstract: Disclosed embodiments provide data augmentation techniques in which collected sensor data and simulated sensor data created by transforming collected sensor data are used to train a machine learning model (MLM), the MLM is then deployed on an integrated circuit chip of an embedded device, live sensor data received by the embedded device is then either transformed and input to the MLM or input to the MLM without transformation, and the MLM then performs a prediction by, for example, recognizing a gesture made by the user of the embedded device.
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