Invention Grant
- Patent Title: Model based dynamic positional correction for digital lithography tools
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Application No.: US16277805Application Date: 2019-02-15
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Publication No.: US10996572B2Publication Date: 2021-05-04
- Inventor: Tamer Coskun , Muhammet Poyraz , Qin Zhong , Pacha Mongkolwongrojn
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The present disclosure generally relates to photolithography systems, and methods for correcting positional errors in photolithography systems. When a photolithography system is first started, the system enters a stabilization period. During the stabilization period, positional readings and data, such as temperature, pressure, and humidity data, are collected as the system prints or exposes a substrate. A model is created based on the collected data and the positional readings. The model is then used to estimate errors in subsequent stabilization periods, and the estimated errors are dynamically corrected during the subsequent stabilization periods.
Public/Granted literature
- US20200264514A1 MODEL BASED DYNAMIC POSITIONAL CORRECTION FOR DIGITAL LITHOGRAPHY TOOLS Public/Granted day:2020-08-20
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