Invention Grant
- Patent Title: Semiconductor device comprising work function metal pattern in boundary region and method for fabricating the same
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Application No.: US16890456Application Date: 2020-06-02
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Publication No.: US10998324B2Publication Date: 2021-05-04
- Inventor: Ki Wook Jung , Dong Oh Kim , Seok Han Park , Chan Sic Yoon , Ki Seok Lee , Ho In Lee , Ju Yeon Jang , Je Min Park , Jin Woo Hong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2017-0017632 20170208
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/092 ; H01L27/108 ; H01L29/10 ; H01L21/8238 ; H01L23/535

Abstract:
A semiconductor device and method for fabricating the same are provided. The semiconductor device includes a substrate including a cell region, a core region, and a boundary region between the cell region and the core region, a boundary element isolation layer in the boundary region of the substrate to separate the cell region from the core region, a high-k dielectric layer on at least a part of the boundary element isolation layer and the core region of the substrate, a first work function metal pattern comprising a first extension overlapping the boundary element isolation layer on the high-k dielectric layer, and a second work function metal pattern comprising a second extension overlapping the boundary element isolation layer on the first work function metal pattern, wherein a first length of the first extension is different from a second length of the second extension.
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