Invention Grant
- Patent Title: Nonvolatile semiconductor devices including non-circular shaped channel patterns and methods of manufacturing the same
-
Application No.: US15901093Application Date: 2018-02-21
-
Publication No.: US10999045B2Publication Date: 2021-05-04
- Inventor: Yong-Hoon Son , Hanmei Choi , Kihyun Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2016-0044395 20160411
- Main IPC: H04L5/00
- IPC: H04L5/00 ; H01L29/78 ; H01L27/11565 ; H01L27/1157 ; H01L27/11575 ; H01L27/11582 ; H01L29/66 ; H01L29/792 ; H04L1/18

Abstract:
A non-volatile memory structure can include a substrate extending horizontally and a filling insulating pattern extending vertically from the substrate. A plurality of active channel patterns can extend vertically from the substrate in a zig-zag pattern around a perimeter of the filling insulating pattern, where each of the active channel patterns having a respective non-circular shaped horizontal cross-section. A vertical stack of a plurality of gate lines can each extend horizontally around the filling insulating pattern and the plurality of active channel patterns.
Public/Granted literature
Information query