- Patent Title: Chip transfer device and chip transferring method using the same
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Application No.: US16282581Application Date: 2019-02-22
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Publication No.: US11004705B2Publication Date: 2021-05-11
- Inventor: Doyoung Kwag , Sangmoo Park , Yoonsuk Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Nixon & Vanderhye P.C.
- Priority: KR10-2018-0036333 20180329
- Main IPC: H01L25/075
- IPC: H01L25/075 ; H01L21/67 ; H01L21/687 ; H01L33/62

Abstract:
A chip transfer device is provided. The chip transfer device according to an embodiment includes a support, a plurality of pick-up modules disposed on the support in a horizontal direction, and movably connected to the support, and a controller configured to control the plurality of pick-up modules, wherein each of the plurality of pick-up modules is movable while collectively picking up a plurality of chips on a corresponding wafer among a plurality of wafers, and wherein the controller moves and adjusts the plurality of pick-up modules in a horizontal direction.
Public/Granted literature
- US20190304816A1 CHIP TRANSFER DEVICE AND CHIP TRANSFERING METHOD USING THE SAME Public/Granted day:2019-10-03
Information query
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