- Patent Title: Roll to roll fabrication apparatus for preventing thermal impact
-
Application No.: US15812767Application Date: 2017-11-14
-
Publication No.: US11008656B2Publication Date: 2021-05-18
- Inventor: Seunghyun Youk , Yunho Kook , Sungwoo Choi
- Applicant: LG DISPLAY CO., LTD.
- Applicant Address: KR Seoul
- Assignee: LG DISPLAY CO., LTD.
- Current Assignee: LG DISPLAY CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: Seed IP Law Group LLP
- Priority: KR10-2016-0159702 20161128
- Main IPC: C23C16/54
- IPC: C23C16/54 ; C23C16/46 ; H01J37/32 ; H01L31/20 ; H01L51/56 ; C23C16/02 ; H01L27/12 ; H01L27/32

Abstract:
A roll to roll fabrication apparatus includes: a vacuum chamber having an installation chamber and a process chamber; a preprocessing unit in the installation chamber to process a surface of a film which is transferred to enhance a film characteristic in a subsequent CVD process; a process drum in the process chamber to wind the film thereon; a process treatment unit in the process chamber to form a layer by performing a CVD process on the film wound on the process drum; and a plurality of heaters in the installation chamber and the process chamber to gradually increase a temperature of the film wound on the process drum to prevent application of a thermal impact to the film due to the high-temperature process drum.
Public/Granted literature
- US20180148843A1 ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT Public/Granted day:2018-05-31
Information query
IPC分类: