- 专利标题： Manufacturing method for multi-layer PZT microactuator having a poled but inactive PZT constraining layer
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申请号： US16357181申请日： 2019-03-18
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公开(公告)号： US11011195B2公开(公告)日： 2021-05-18
- 发明人: Kuen Chee Ee , Long Zhang , Peter Hahn , David Glaess
- 申请人： Magnecomp Corporation
- 申请人地址： US CA Murrieta
- 专利权人： Magnecomp Corporation
- 当前专利权人： Magnecomp Corporation
- 当前专利权人地址： US CA Murrieta
- 代理机构： DLA Piper LLP (US)
- 主分类号： G11B5/48
- IPC分类号： G11B5/48 ; H01L41/293 ; G11B5/56 ; G11B5/55 ; H01L41/25 ; H01L41/257 ; H01L41/312 ; H01L41/297
摘要：
A multi-layer piezoelectric microactuator assembly has at least one poled and active piezoelectric layer and one poled but inactive piezoelectric layer. The poled but inactive layer acts as a constraining layer in resisting expansion or contract of the first piezoelectric layer.
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