Invention Grant
- Patent Title: Flipchip package
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Application No.: US16543076Application Date: 2019-08-16
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Publication No.: US11012790B2Publication Date: 2021-05-18
- Inventor: Jeremy Parker , Kazunori Hayata
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R7/16 ; H04R31/00

Abstract:
A system and method for the manufacture of flipchip microelectromechanical system devices. A method comprises forming a cavity from a first surface of a rigid back through to a second surface of the rigid back, depositing an anisotropic conductive film over the first surface of the multilayer rigid back to conform to a contour of a microelectromechanical system device, positioning the a microelectromechanical system device over the cavity formed in the multilayered rigid back, and causing contact of the microelectromechanical system device with the anisotropic conductive film deposited over the first surface of the multilayer rigid back.
Public/Granted literature
- US20200059737A1 FLIPCHIP PACKAGE Public/Granted day:2020-02-20
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