Invention Grant
- Patent Title: Gas-phase reactor and system having exhaust plenum and components thereof
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Application No.: US14219839Application Date: 2014-03-19
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Publication No.: US11015245B2Publication Date: 2021-05-25
- Inventor: Eric Hill , Shawn Thomas
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/52
- IPC: C23C16/52 ; C23C16/44 ; H01J37/32 ; H01L21/67 ; C23C16/455
Abstract:
An improved exhaust system for a gas-phase reactor and a reactor and system including the exhaust system are disclosed. The exhaust system includes a channel fluidly coupled to an exhaust plenum. The improved exhaust system allows operation of a gas-phase reactor with desired flow characteristics while taking up relatively little space within a reaction chamber.
Public/Granted literature
- US20150267301A1 GAS-PHASE REACTOR AND SYSTEM HAVING EXHAUST PLENUM AND COMPONENTS THEREOF Public/Granted day:2015-09-24
Information query
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