Invention Grant
- Patent Title: Method of manipulating a sample in an evacuated chamber of a charged particle apparatus
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Application No.: US15099453Application Date: 2016-04-14
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Publication No.: US11017980B2Publication Date: 2021-05-25
- Inventor: Tomá{hacek over (s)} Vystav{hacek over (e)}l , Petronella Catharina Maria Baken , Ernst Jan Ruben Vesseur , Pavel Poloucek
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Priority: EP15163671 20150415
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/28 ; H01J37/317

Abstract:
The invention relates to a method of manipulating a sample in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method including: providing a sample on a first substrate; bringing an extremal end of a manipulator in contact with the sample; attaching the sample to said extremal end, the attaching being a removable attaching; lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate; attaching the sample to the second substrate; and detaching the sample from the extremal end of the manipulator. At least one of the steps of attaching the sample being performed solely by bringing the sample into contact with a bundle of carbon nanotubes.
Public/Granted literature
- US20160307727A1 METHOD OF MANIPULATING A SAMPLE IN AN EVACUATED CHAMBER OF A CHARGED PARTICLE APPARATUS Public/Granted day:2016-10-20
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