Invention Grant
- Patent Title: Self-aligned memory decks in cross-point memory arrays
-
Application No.: US16665955Application Date: 2019-10-28
-
Publication No.: US11018300B2Publication Date: 2021-05-25
- Inventor: Agostino Pirovano , Fabio Pellizzer , Anna Maria Conti , Andrea Redaelli , Innocenzo Tortorelli
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A multi-layer memory device with an array having multiple memory decks of self-selecting memory cells is provided in which N memory decks may be fabricated with N+1 mask operations. The multiple memory decks may be self-aligned and certain manufacturing operations may be performed for multiple memory decks at the same time. For example, patterning a bit line direction of a first memory deck and a word line direction in a second memory deck above the first memory deck may be performed in a single masking operation, and both decks may be etched in a same subsequent etching operation. Such techniques may provide efficient fabrication which may allow for enhanced throughput, additional capacity, and higher yield for fabrication facilities relative to processing techniques in which each memory deck is processed using two or more mask and etch operations per memory deck.
Public/Granted literature
- US20200075858A1 SELF-ALIGNED MEMORY DECKS IN CROSS-POINT MEMORY ARRAYS Public/Granted day:2020-03-05
Information query
IPC分类: