Invention Grant
- Patent Title: Copolymer formulation for directed self assembly, methods of manufacture thereof and articles comprising the same
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Application No.: US14944473Application Date: 2015-11-18
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Publication No.: US11021630B2Publication Date: 2021-06-01
- Inventor: Phillip D. Hustad , Peter Trefonas, III , Shih-Wei Chang
- Applicant: Rohm and Haas Electronic Materials LLC , Dow Global Technologies LLC
- Applicant Address: US MA Marlborough; US MI Midland
- Assignee: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- Current Assignee Address: US MA Marlborough; US MI Midland
- Agency: Cantor Colburn LLP
- Main IPC: B05D3/00
- IPC: B05D3/00 ; C09D153/00 ; G03F7/00

Abstract:
Disclosed herein is a method comprising disposing upon a substrate a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a reactive moiety that is operative to react with a substrate upon which it is disposed; and where the additive polymer comprises a homopolymer that is the chemically and structurally the same as one of the polymers in the block copolymer or where the additive polymer comprises a random copolymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent; and annealing the composition.
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