- 专利标题: Solid-state imaging element, electronic apparatus, and semiconductor device
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申请号: US16496752申请日: 2018-03-16
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公开(公告)号: US11024663B2公开(公告)日: 2021-06-01
- 发明人: Hidenobu Tsugawa , Tomoharu Ogita
- 申请人: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- 申请人地址: JP Kanagawa
- 专利权人: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- 当前专利权人: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- 当前专利权人地址: JP Kanagawa
- 代理机构: Chip Law Group
- 优先权: JPJP2017-067655 20170330
- 国际申请: PCT/JP2018/010378 WO 20180316
- 国际公布: WO2018/180570 WO 20181004
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; A61B1/05 ; H04N5/369 ; B60R11/04 ; B60R16/023 ; G05D1/02
摘要:
The present technology relates a solid-state imaging element, an electronic apparatus, and a semiconductor device each of which enables deterioration of electrical characteristics in a well region of a semiconductor element formed in a thinned semiconductor substrate to be restrained. A solid-state imaging element as a first aspect of the present technology is a solid-state imaging element constituted by laminating semiconductor substrates in three or more layers, in which of the laminated semiconductor substrates, at least one sheet of the semiconductor substrate is thinned, and an impurity region whose carrier type is the same as that of the thinned semiconductor substrate is formed between a well region and a thinned surface portion in the thinned semiconductor substrate. The present technology can, for example, be applied to a CMOS image sensor.
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