- Patent Title: Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
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Application No.: US16494200Application Date: 2018-02-15
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Publication No.: US11029612B2Publication Date: 2021-06-08
- Inventor: Maarten Hartger Kimman , Hans Butler , Olof Martinus Josephus Fischer , Christiaan Alexander Hoogendam , Theodorus Mattheus Joannus Maria Huizinga , Johannes Marinus Maria Rovers , Eric Pierre-Yves Vennat , Maurice Willem Jozef Etienne Wijckmans
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP17161329 20170316,EP17172365 20170523,EP17190344 20170911,EP17200742 20171109
- International Application: PCT/EP2018/053808 WO 20180215
- International Announcement: WO2018/166745 WO 20180920
- Main IPC: G03F7/20
- IPC: G03F7/20 ; F16C39/06

Abstract:
The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.
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