Invention Grant
- Patent Title: Temperature measurement substrate and temperature measurement system
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Application No.: US16095114Application Date: 2017-04-06
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Publication No.: US11035741B2Publication Date: 2021-06-15
- Inventor: Tadashi Mitsunari , Satoshi Tanaka , Tsuyoshi Moriya , Toshiya Matsuda , Masaaki Miyagawa , Kenya Iwasaki
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JPJP2016-083933 20160419
- International Application: PCT/JP2017/014374 WO 20170406
- International Announcement: WO2017/183471 WO 20171026
- Main IPC: G01K11/32
- IPC: G01K11/32 ; G01K11/324
Abstract:
A temperature measurement substrate according to an embodiment of the present disclosure includes: a substrate which is any one of a semiconductor wafer and a substrate for a flat panel display; and at least one optical fiber laid on a surface of the substrate and having a first pattern portion and a second pattern portion formed more densely than the first pattern portion.
Public/Granted literature
- US20190120703A1 TEMPERATURE MEASUREMENT SUBSTRATE AND TEMPERATURE MEASUREMENT SYSTEM Public/Granted day:2019-04-25
Information query
