发明授权
- 专利标题: Circulating EFEM
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申请号: US16395406申请日: 2019-04-26
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公开(公告)号: US11049736B2公开(公告)日: 2021-06-29
- 发明人: Hiroshi Igarashi , Tsutomu Okabe , Mutsuo Sasaki
- 申请人: TDK CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JPJP2018-088730 20180502
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/677
摘要:
A circulating EFEM includes an introduction port for introducing a gas, a housing for circulating the introduced gas, and a discharge port for discharging the gas from the housing into a discharge pipe. The discharge port includes a box and a damper. The box is disposed to surround a discharge opening formed on the housing and connected to the discharge pipe. The damper is disposed inside the box to close and open the discharge port and adjusts a discharge amount of the gas via the discharge opening by at least partially moving in response to a differential pressure between the housing and the box.
公开/授权文献
- US20190341273A1 CIRCULATING EFEM 公开/授权日:2019-11-07
信息查询
IPC分类: