- 专利标题: Solid-state imaging element, electronic device, and fabrication method
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申请号: US16494845申请日: 2018-03-16
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公开(公告)号: US11049895B2公开(公告)日: 2021-06-29
- 发明人: Shinpei Fukuoka , Hideaki Togashi
- 申请人: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- 申请人地址: JP Kanagawa
- 专利权人: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- 当前专利权人: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- 当前专利权人地址: JP Kanagawa
- 代理机构: Sheridan Ross P.C.
- 优先权: JPJP2017-069803 20170331
- 国际申请: PCT/JP2018/010393 WO 20180316
- 国际公布: WO2018/180575 WO 20181004
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H04N5/374
摘要:
This disclosure relates to a solid-state imaging element, an electronic device, and a fabrication method that each enable further reduction of the element layout area. A photoelectric conversion element disposed on a first face of a semiconductor substrate is connected to a gate of an amplification transistor and a floating diffusion disposed in a second face of the semiconductor substrate through penetrating electrodes that are each connected to the photoelectric conversion element. In this pixel structure, a dielectric layer is disposed between the penetrating electrodes in the second face, and a shielded electrode is disposed on an inner side of the dielectric layer seen from a side of the second face. The dielectric layer is thicker than a gate insulating film of the transistor on the side of the second face. This disclosure is applicable to a back-side illumination solid-state imaging element, for example.
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