Invention Grant
- Patent Title: Multi-device transducer modulus, electronic apparatus including the transducer modulus and method for manufacturing the transducer modulus
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Application No.: US15638178Application Date: 2017-06-29
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Publication No.: US11053115B2Publication Date: 2021-07-06
- Inventor: Marco Omar Ghidoni
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102016000121210 20161130
- Main IPC: G01L13/02
- IPC: G01L13/02 ; B81B7/00 ; G01L9/00 ; G01J1/42 ; G01J5/04 ; G01J1/02 ; G01L19/06 ; B81C1/00 ; G01D11/24

Abstract:
A transducer modulus, comprising: a substrate; a cap on the substrate, defining a chamber; and a sensor modulus in the chamber, integrating a first MEMS transducer facing the chamber, and a second MEMS transducer facing the supporting substrate. The cap has a first opening that forms a path for access of the first environmental quantity exclusively towards a sensitive element of the first transducer, and the supporting substrate has a second opening that forms a path for access of the second environmental quantity exclusively towards a sensitive element of the second transducer.
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