Invention Grant
- Patent Title: Three-dimensional measurement device
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Application No.: US16363975Application Date: 2019-03-25
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Publication No.: US11054241B2Publication Date: 2021-07-06
- Inventor: Hiroyuki Ishigaki , Takahiro Mamiya
- Applicant: CKD Corporation
- Applicant Address: JP Aichi
- Assignee: CKD Corporation
- Current Assignee: CKD Corporation
- Current Assignee Address: JP Aichi
- Agency: Osha Bergman Watanabe & Burton LLP
- Priority: JPJP2016-189281 20160928
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/00 ; G01B11/24

Abstract:
A three-dimensional measurement device includes: an optical system that splits incident light into two lights and radiates lights to a measurement object and to a reference surface, and recombines the two lights to emit combined light; a first irradiator that emits first light including first polarized light and entering a first surface; a second irradiator that emits second light including second polarized light and entering a second surface; a first imaging system to which the first output light enters wherein the first output light is emitted from the first surface when the first light enters the first surface; a second imaging system to which the second output light enters wherein the second output light is emitted from the second surface when the second light enters the second surface; and an image processor that performs three-dimensional measurement based on interference fringe images obtained by the first and second imaging systems.
Public/Granted literature
- US20190219379A1 THREE-DIMENSIONAL MEASUREMENT DEVICE Public/Granted day:2019-07-18
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