Invention Grant
- Patent Title: Confocal displacement measurement device and a confocal thickness measurement device
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Application No.: US16203648Application Date: 2018-11-29
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Publication No.: US11060917B2Publication Date: 2021-07-13
- Inventor: Shoma Kuga
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JP2014-133342 20140627
- Main IPC: G01J3/45
- IPC: G01J3/45 ; G01B11/00 ; G01B11/06 ; G01J3/52 ; G01J3/02 ; G02B6/42 ; G02B6/38 ; G01J3/46 ; G01D5/26 ; G02B6/36 ; G02B6/24

Abstract:
Provided are a multi-wavelength photoelectric measurement device, a confocal measurement device, an interference measurement device, and a color measurement device capable of measuring the characteristic amount of a measurement object such as the thickness, distance, displacement, or color with high accuracy using multi-wavelength light such as white light. The multi-wavelength photoelectric measurement device includes a laser light source, a light source optical member for concentrating light from the laser light source, a phosphor excited by light concentrated by the light source optical member, an optical fiber unit that includes one or a plurality of optical fibers and the phosphor disposed on a first end, receives light emitted by the phosphor from the first end, and transmits the received light toward a second end, and a head optical member that concentrates light emitted from the second end of the optical fiber unit toward a measurement object.
Public/Granted literature
- US20190094074A1 Confocal Displacement Measurement Device And A Confocal Thickness Measurement Device Public/Granted day:2019-03-28
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