- 专利标题: Semiconductor devices and fabrication methods thereof
-
申请号: US16536766申请日: 2019-08-09
-
公开(公告)号: US11063052B2公开(公告)日: 2021-07-13
- 发明人: Fei Zhou
- 申请人: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- 申请人地址: CN Shanghai; CN Beijing
- 专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人地址: CN Shanghai; CN Beijing
- 代理机构: Anova Law Group, PLLC
- 优先权: CN201811124624.9 20180926
- 主分类号: H01L27/11
- IPC分类号: H01L27/11 ; H01L21/8238 ; H01L21/265 ; H01L29/36 ; H01L21/306 ; H01L27/092 ; H01L29/66 ; H01L21/762 ; H01L21/02
摘要:
A semiconductor device and a fabrication method are provided. The method includes forming a first fin structure and a second fin structure on a substrate. The first fin structure includes a first sidewall surface, facing to the second fin structure, and a second sidewall surface opposite to the first sidewall surface. The method also includes forming an isolation layer to cover a portion of sidewall surfaces of the first fin structure and the second fin structure. The top surface of the isolation layer is lower than the top surfaces of the first fin structure and the second fin structure. The method further includes forming a first sidewall on the first sidewall surface; forming a first doped layer in the first fin structure; and forming a second doped layer in the second fin structure. The first sidewall covers a portion of a sidewall surface of the first doped layer.
公开/授权文献
- US20200098765A1 SEMICONDUCTOR DEVICES AND FABRICATION METHODS THEREOF 公开/授权日:2020-03-26
信息查询
IPC分类: