Invention Grant
- Patent Title: Trench-based optical components for photonics chips
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Application No.: US16597323Application Date: 2019-10-09
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Publication No.: US11067751B2Publication Date: 2021-07-20
- Inventor: Colleen Meagher , Karen Nummy , Yusheng Bian , Ajey Poovannummoottil Jacob
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: G02B6/122
- IPC: G02B6/122 ; G02B6/136 ; G02B6/12

Abstract:
Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.
Public/Granted literature
- US20210109283A1 TRENCH-BASED OPTICAL COMPONENTS FOR PHOTONICS CHIPS Public/Granted day:2021-04-15
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