公开(公告)号：US20210278611A1

公开(公告)日：2021-09-09

申请号：US16807811

申请日：2020-03-03

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Asli Sahin ,  Colleen Meagher ,  Thomas Houghton ,  Bo Peng ,  Karen Nummy ,  Javier Ayala ,  Yusheng Bian

IPC: G02B6/42 ,  H01L21/84 ,  H01L21/311

Abstract: One illustrative device disclosed herein includes a V-groove in a base semiconductor layer of a semiconductor-on-insulator (SOI) substrate, wherein the V-groove is adapted to have a fiber optics cable positioned therein, and an optical component positioned above the V-groove. The device also includes a first layer of silicon dioxide positioned above the optical component, a second layer of silicon dioxide positioned on and in contact with the first layer of silicon dioxide and a third layer of silicon dioxide positioned on and in contact with the second layer of silicon dioxide.

公开(公告)号：US20210389521A1

公开(公告)日：2021-12-16

申请号：US16901509

申请日：2020-06-15

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Judson Holt ,  Yusheng Bian ,  Andreas D. Stricker ,  Colleen Meagher ,  Michal Rakowski

IPC: G02B6/12 ,  G02B6/13 ,  H01L31/0232 ,  H01L31/028 ,  H01L31/18

Abstract: Structures for a photodetector and methods of fabricating a structure for a photodetector. A photodetector may have a light-absorbing layer comprised of germanium. A waveguide core may be coupled to the light-absorbing layer. The waveguide core may be comprised of a dielectric material, such as silicon nitride. Another waveguide core, which may be comprised of a different material such as single-crystal silicon, may be coupled to the light-absorbing layer.

公开(公告)号：US20210109283A1

公开(公告)日：2021-04-15

申请号：US16597323

申请日：2019-10-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Colleen Meagher ,  Karen Nummy ,  Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/122 ,  G02B6/136

Abstract: Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.

公开(公告)号：US11199672B1

公开(公告)日：2021-12-14

申请号：US16901509

申请日：2020-06-15

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Judson Holt ,  Yusheng Bian ,  Andreas D. Stricker ,  Colleen Meagher ,  Michal Rakowski

IPC: G02B6/42 ,  H01L31/0232 ,  G02B6/12 ,  G02B6/13 ,  H01L31/18 ,  H01L31/028

Abstract: Structures for a photodetector and methods of fabricating a structure for a photodetector. A photodetector may have a light-absorbing layer comprised of germanium. A waveguide core may be coupled to the light-absorbing layer. The waveguide core may be comprised of a dielectric material, such as silicon nitride. Another waveguide core, which may be comprised of a different material such as single-crystal silicon, may be coupled to the light-absorbing layer.

公开(公告)号：US11567260B1

公开(公告)日：2023-01-31

申请号：US17501508

申请日：2021-10-14

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Won Suk Lee ,  Lin Jiang ,  Colleen Meagher

IPC: G02B6/122 ,  G02B6/36 ,  H01L31/0232

Abstract: Structures including an optical component and methods of forming a structure including an optical component. The structure includes an optical component on a substrate, and a back-end-of-line stack including multiple metal levels. Each of the metal levels includes a dielectric layer and metal features positioned over the optical component as metal fill in the dielectric layer. The metal features in at least two of the metal levels are arranged to overlap such that the optical component is fully covered normal to the substrate.

公开(公告)号：US11067751B2

公开(公告)日：2021-07-20

申请号：US16597323

申请日：2019-10-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Colleen Meagher ,  Karen Nummy ,  Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/122 ,  G02B6/136 ,  G02B6/12

Abstract: Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.