- 专利标题： Two-dimensional optical scanning mirror device, manufacturing method for same, two-dimensional optical scanner and image projector
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申请号： US16193084申请日： 2018-11-16
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公开(公告)号： US11067792B2公开(公告)日： 2021-07-20
- 发明人: Toshio Katsuyama , Ryoya Ishigami
- 申请人： National University Corporation University of Fukui
- 申请人地址： JP Fukui
- 专利权人： National University Corporation University of Fukui
- 当前专利权人： National University Corporation University of Fukui
- 当前专利权人地址： JP Fukui
- 代理机构： Westerman, Hattori, Daniels & Adrian, LLP
- 优先权： JPJP2016-212976 20161031
- 主分类号： G02B26/10
- IPC分类号： G02B26/10 ; G02B26/08 ; H04N9/31 ; H01F10/08 ; G03B21/20 ; H01F41/32 ; G02B27/01
摘要：
A two-dimensional optical scanning mirror device, a manufacturing method for the same, a two-dimensional optical scanning device and an image projector. A two-dimensional optical scanning mirror device includes a substrate, a movable mirror portion supported on the substrate in such a manner that two-dimension optical scanning is possible, a hard magnetic thin film provided in the movable mirror portion and a magnetic field generator that includes at least an alternating magnetic field generator for driving the movable mirror portion, where the hard magnetic thin film has a magnetization direction in a direction of a film plane, and the ratio of the magnetic field generated by the magnetic field generator relative to the coercive force of the hard magnetic thin film is 0.2 or lower.